Pulsed Laser Annealing Of Silicon And Metal/Silicon Systems

E D'Anna; G Leggieri; A Luches; G Majni; M R Perrone

doi:10.1117/12.938890

12 November 1986 Pulsed Laser Annealing Of Silicon And Metal/Silicon Systems

E D'Anna, G Leggieri, A Luches, G Majni, M R Perrone

Proceedings Volume 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering; (1986) https://doi.org/10.1117/12.938890
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

Epitaxial regrowth of ion implanted silicon and formation of metal silicides through the reaction of Si single crystals with thin deposited metal (Pt, Pd, Cr, Mo, Ti) films was obtained with different (ruby, Nd:glass, excimer) pulsed laser sources. Temperature profiles and evolutions into the samples were calculated. It was found that partial and even complete reactions of the metal films with silicon can be obtained at laser fluences lower than those needed for melting of the materials. The morphology of the irradiated surfaces was studied with a scanning electron microscope. Formation of damage ripple patterns is discussed. Epit-axial regrowth and silicide formation without surface damage of the irradiated materials was obtained by using excimer lasers.

Citation Download Citation

E D'Anna, G Leggieri, A Luches, G Majni, and M R Perrone "Pulsed Laser Annealing Of Silicon And Metal/Silicon Systems", Proc. SPIE 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering, (12 November 1986); https://doi.org/10.1117/12.938890

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available