Characteristics Of A Gas-Puff Z-Pinch Plasma X-Ray Source

Hideo Yoshihara; Ikuo Okada; Yasunao Saitoh; Seiichi Itabashi

doi:10.1117/12.963677

30 June 1986 Characteristics Of A Gas-Puff Z-Pinch Plasma X-Ray Source

Hideo Yoshihara, Ikuo Okada, Yasunao Saitoh, Seiichi Itabashi

Proceedings Volume 0632, Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V; (1986) https://doi.org/10.1117/12.963677
Event: 1986 Microlithography Conferences, 1986, Santa Clara, United States

Abstract

A high brightness plasma x-ray source is developed. This source can be linked to a conventional aligner by directing x-rays downwards into the atmosphere. By adopting the low pressure gas injection method, a wide discharge timing margin and strong x-ray emission are attained. X-rays having line spectra of 9-14 Å in wavelength are emitted from the Neon gas plasma. As high mask contrast can be obtained, submicron resist patterns can easily be replicated by using a 0.4 μm thick Ta absorber. The mask distortion due to mask heating is not a serious problem in He atmospheric exposure. The exposure time is about 13 seconds with a 3 Hz discharge repetition rate. Compared with a conventional source, a throughput 10 times greater is achieved.

Citation Download Citation

Hideo Yoshihara, Ikuo Okada, Yasunao Saitoh, and Seiichi Itabashi "Characteristics Of A Gas-Puff Z-Pinch Plasma X-Ray Source", Proc. SPIE 0632, Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V, (30 June 1986); https://doi.org/10.1117/12.963677

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available