High Power Repetitive Excimer Lasers Pumped By An All Solid State Magnetic Exciter

Osamu Kobayashi; Koji Noda; Tsutomu Shimada; Minoru Obara

doi:10.1117/12.961172

23 June 1986 High Power Repetitive Excimer Lasers Pumped By An All Solid State Magnetic Exciter

Osamu Kobayashi, Koji Noda, Tsutomu Shimada, Minoru Obara

Proceedings Volume 0622, High Power and Solid State Lasers; (1986) https://doi.org/10.1117/12.961172
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

In a high repetition rate excimer laser operation, the lifetime of the exciter is one of the most important problems. A thyratron is commonly used as a switch in the power supply but its lifetime limits laser operation time even if it is used with a magnetic assist which makes use of the nonlinearity of ferromagnetic material. To attain a nearly endless lifetime of the excimer laser exciter, we have developed an all solid state exciter which consists of a high-voltage transformer switched by a Silicon Controlled Rectifier (SCR), producing a pulse whose energy and duration are 11.2 J and 8 us, respectively, and a three stage magnetic compressor. With a 1.4-ohm dummy load, output peak power, energy/pulse, and pulse duration were 100 MW, 5.2 J, and 100 ns, respectively. The electrical efficiency of the exciter was 47%. The energy loss of 6 J in the exciter was due both to the core loss and the transfer loss. It should be noted that the time jitter between the SCR gate input pulse and the output voltage pulse was less than 12 ns. An KrF laser output of 33 mJ has been obtained after optimizing the total pressure, gas content (He buffer), output coupling, and the capacity of the resonant capacitor. With an Ne dilluent mixture, 42 mJ has been obtained (not optimized ). The design and the performance of the exciter and the laser operation are fully described. In addition, we have discussed the temperature rise of the core operating at a repetition rate of 1 kpps.

Citation Download Citation

Osamu Kobayashi, Koji Noda, Tsutomu Shimada, and Minoru Obara "High Power Repetitive Excimer Lasers Pumped By An All Solid State Magnetic Exciter", Proc. SPIE 0622, High Power and Solid State Lasers, (23 June 1986); https://doi.org/10.1117/12.961172

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