Optical Three-Dimensional Displacement Meter

Eiji Ogita; Toshitsugu Ueda; Daisuke Yamazaki

doi:10.1117/12.949533

25 November 1985 Optical Three-Dimensional Displacement Meter

Eiji Ogita, Toshitsugu Ueda, Daisuke Yamazaki

Proceedings Volume 0556, Intl Conf on Speckle; (1985) https://doi.org/10.1117/12.949533
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

We have developed a displacement meter which simultaneously measures the (distance and direction of) movement of an object in three dimensions. A piece of retroreflective "Scotchlite" adhesive tape, with a grid printed on it, is attached to the object (target) and illuminated by a single laser beam. The displacements in the X-Y plane perpendicular to the beam are determined by measuring the movement of the grid images appearing at the X and Y detectors. (The reflected beam is split, and transmitted to X, Y and Z detectors). The displacement along the Z axis parallel to the beam is determined -- using a Michelson interferometer -- from the movement of interference fringes which occur when the light reflected from the target is superimposed on a direct "reference" beam from the laser. A new high speed image sensor is used for X, Y and Z detectors to measure the movement of the grid image and the interference pattern -- as a result, the meter has a frequency response from DC to 20 kHz. The sensor is a high resolution spatial filter (array of photocells connected or scanned in such a manner as to be sensitive to a particular light pattern on the array). Using a spatial filter eliminates the need for correlation or other complex signal processing. The accuracy is of the order of 20 μm for X and Y axes and 1.5 μm for the Z axis. The optical system (lenses, mirrors and sensors) is compact, so the meter is portable.

Citation Download Citation

Eiji Ogita, Toshitsugu Ueda, and Daisuke Yamazaki "Optical Three-Dimensional Displacement Meter", Proc. SPIE 0556, Intl Conf on Speckle, (25 November 1985); https://doi.org/10.1117/12.949533

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