Thin-Film Microstructure Modeling

Liao Bangjun; H. A. Macleod

doi:10.1117/12.976106

20 November 1985 Thin-Film Microstructure Modeling

Liao Bangjun, H. A. Macleod

Proceedings Volume 0540, Southwest Conf on Optics '85; (1985) https://doi.org/10.1117/12.976106
Event: 1985 Albuquerque Conferences on Optics, 1985, Albuquerque, United States

Abstract

A model of thin-film growth in which the molecules are represented by hard disks has been implemented on a microcomputer. The effect on film microstructure of variations in relaxation parameter, A, the ratio of mean distance traveled by a molecule after impingement on the film surface to a molecular diameter, has been investigated. Nodular growth has been simulated in single and two-layer systems. Violations of the tangent law of column orientation have been examined.

Citation Download Citation

Liao Bangjun and H. A. Macleod "Thin-Film Microstructure Modeling", Proc. SPIE 0540, Southwest Conf on Optics '85, (20 November 1985); https://doi.org/10.1117/12.976106

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available