Dc Electroplating Of Sub-Micron Gold Patterns On X-Ray Masks

G. E. Georgiou; C A Jankoski; T A. Palumbo

doi:10.1117/12.942333

18 June 1984 Dc Electroplating Of Sub-Micron Gold Patterns On X-Ray Masks

G. E. Georgiou, C A Jankoski, T A. Palumbo

Proceedings Volume 0471, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III; (1984) https://doi.org/10.1117/12.942333
Event: 1984 Microlithography Conferences, 1984, Santa Clara, United States

Abstract

Current Bell Laboratories X-ray mask absorber pattern transfer technology consists of sputter-etching a 6000 - 7000A thick gold metallization using a 800A thin tantalum etch mask, resulting in features with a 70° wall slope. Since X-ray absorption is exponential with thickness, the resist under the sloped portion of the abosorber will receive various degrees of exposure. Therefore, as X-ray lithography approaches sub-micron dimensions, gold absorber walls must be made vertical in order to provide better resolution and linewidth control. We describe a method for obtaining vertical wall sub-micron gold patterns on X-ray masks by DC gold electroplating into a reactive ion etched trilevel stencil over a 200A gold plating base. A commercial gold sulphite solution is used in a fountain system to gold plate into the trilevel stencil. Gold features as small as 1000A wide and 1pm high have been obtained. The minimum gold feature size appears to be limited by stencil formation. Electroplated gold film stress, microstructure and thickness uniformity are within the prescribed limits for the manufacture of X-ray masks.

Citation Download Citation

G. E. Georgiou, C A Jankoski, and T A. Palumbo "Dc Electroplating Of Sub-Micron Gold Patterns On X-Ray Masks", Proc. SPIE 0471, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III, (18 June 1984); https://doi.org/10.1117/12.942333

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available