How Process Technology Can Make Submicron Photolithography Easier : Some Practical Examples.

F Buiguez; J P Lazzari; E Tabouret; M. Thouy

doi:10.1117/12.941880

29 June 1984 How Process Technology Can Make Submicron Photolithography Easier : Some Practical Examples.

F Buiguez, J P Lazzari, E Tabouret, M. Thouy

Proceedings Volume 0470, Optical Microlithography III: Technology for the Next Decade; (1984) https://doi.org/10.1117/12.941880
Event: 1984 Microlithography Conferences, 1984, Santa Clara, United States

Abstract

For photolithography to become a technique enabling the submicron field to be reached, research work on resist exposure tools and principles is not in itself sufficient. It is also necessary to try to use all the possibilities offered by technological procedures such as coating and dry etching to the full. It is for this reason that we have been led to develop recent microlithography techniques using plasma etching to condition the substrate flatness as well as the etching profiles, and similarly to transfer fine geometries with accurate dimensional control. In this paper, we will present sloping wall etching, planarization and spacer production techniques.

Citation Download Citation

F Buiguez, J P Lazzari, E Tabouret, and M. Thouy "How Process Technology Can Make Submicron Photolithography Easier : Some Practical Examples.", Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); https://doi.org/10.1117/12.941880

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available