Laser-Induced Deposition Of Metals

Y Rytz-Froidevaux; R. P Salathe

doi:10.1117/12.939435

14 June 1984 Laser-Induced Deposition Of Metals

Y Rytz-Froidevaux, R. P Salathe

Proceedings Volume 0459, Laser-Assisted Deposition, Etching, and Doping; (1984) https://doi.org/10.1117/12.939435
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

We report on the laser-assisted deposition of metals by pyrolytic and photolytic dissociation of metal alkyls. A Kr⁺ laser is used to pyrolytically deposit Al, Cd, and Zn on optically absorbing substrates; deposition rates are typically a few um/s. A frequency-doubled Ar⁺ laser is used to deposit Ga by photolytic decomposition of the parent molecules on quartz substrates. Cadmium deposition is achieved by photolysis of the parent molecules adsorbed on the quartz substrate using the visible output of a Kr⁺ laser. The time evolution of these processes is studied by measuring in situ the optical transmission during deposition. We have observed different morphologies which depend on the deposition mechanism.

Citation Download Citation

Y Rytz-Froidevaux and R. P Salathe "Laser-Induced Deposition Of Metals", Proc. SPIE 0459, Laser-Assisted Deposition, Etching, and Doping, (14 June 1984); https://doi.org/10.1117/12.939435

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