The Impact On Wafer Probe Yield Of Photomask Inspection Sensitivity

George W. Brooks; Robert K. Meister

doi:10.1117/12.935139

7 November 1983 The Impact On Wafer Probe Yield Of Photomask Inspection Sensitivity

George W. Brooks, Robert K. Meister

Proceedings Volume 0394, Optical Microlithography II: Technology for the 1980s; (1983) https://doi.org/10.1117/12.935139
Event: 1983 Microlithography Conferences, 1983, Santa Clara, United States

Abstract

Photomask defects have long been known to be a source of device failure at wafer probe test. Mask inspection coupled with defect repair and mask production process control is the means to reduce the number of photomask defects. Further impact on probe yield with improved photomask quality requires advances in both defect detection sensitivity and defect repair capability. This paper presents a model for considering the impact of increased defect detection sensitivity on wafer probe yield. The model integrates concepts of the frequency distribution of defects by size and the probability of fatal effect of defects. As inspection sensitivity increases and the defects found are eliminated, substantial increases in wafer probe yield can be expected. The model takes into account variables such as design linewidths, device type, critical mask levels, and defect type.

Citation Download Citation

George W. Brooks and Robert K. Meister "The Impact On Wafer Probe Yield Of Photomask Inspection Sensitivity", Proc. SPIE 0394, Optical Microlithography II: Technology for the 1980s, (7 November 1983); https://doi.org/10.1117/12.935139

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available