Laser Targeting Considerations In Redundant Memory Repair

D. Smart; R. Reilly; B. Wells

doi:10.1117/12.934961

9 August 1983 Laser Targeting Considerations In Redundant Memory Repair

D. Smart, R. Reilly, B. Wells

Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934961
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

Selection of alignment targets for memory redundancy repair is a design step that critically affects the yield of the device repair process. Assuming accurate laser beam positioning and energy density control, the ability of the system to reliably identify a reference on each die will result in a high fix-to-attempt ratio on repairable memories.

Citation Download Citation

D. Smart, R. Reilly, and B. Wells "Laser Targeting Considerations In Redundant Memory Repair", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); https://doi.org/10.1117/12.934961

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