Partial Coherence In Projection Printing

Ronald S. Hershel

doi:10.1117/12.956109

6 September 1978 Partial Coherence In Projection Printing

Ronald S. Hershel

Proceedings Volume 0135, Developments in Semiconductor Microlithography III; (1978) https://doi.org/10.1117/12.956109
Event: Developments in Semiconductor Microlithography III, 1978, San Jose, United States

Abstract

A mathematical model for partially coherent imaging in projection printing is presented using Fourier transform methods. Some interesting two-dimensional examples are offered which illustrate the dramatic effects of partial coherence in the mask illumination on the edge contours in the image. Optical simulation techniques are discussed with possible application to system evaluation and design.

Citation Download Citation

Ronald S. Hershel "Partial Coherence In Projection Printing", Proc. SPIE 0135, Developments in Semiconductor Microlithography III, (6 September 1978); https://doi.org/10.1117/12.956109

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