Projection Photolithography Of Large CCD Arrays

Don Baylis

doi:10.1117/12.955364

8 August 1977 Projection Photolithography Of Large CCD Arrays

Don Baylis

Proceedings Volume 0100, Developments in Semiconductor Microlithography II; (1977) https://doi.org/10.1117/12.955364
Event: Developments in Semiconductor Microlithography II, 1977, San Jose, United States

Abstract

The topic of this presentation is the photolithographic aspect of fabricating CCD arrays. CCD stands for Charge-Coupled Device, which is a relatively new type of semiconductor device. The basic CCD device is an analog shift register. In the same manner a digital shift register is used to delay or buffer a stream of digital data, a CCD can be used to delay an analog signal.

Citation Download Citation

Don Baylis "Projection Photolithography Of Large CCD Arrays", Proc. SPIE 0100, Developments in Semiconductor Microlithography II, (8 August 1977); https://doi.org/10.1117/12.955364

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