Beam Deflection At High Accuracy And Precision

D. P. Jablonowski; J. Raamot

doi:10.1117/12.954921

10 January 1977 Beam Deflection At High Accuracy And Precision

D. P. Jablonowski, J. Raamot

Proceedings Volume 0084, Laser Scanning Components and Techniques: Design Considerations/Trends; (1977) https://doi.org/10.1117/12.954921
Event: 20th Annual Technical Symposium, 1976, San Diego, United States

Abstract

Techniques have been developed to extend the accuracy and repeatibility of X-Y beam deflection systems. Absolute beam placements of ± 5pm over 100mm (+ 1/20,000) with precisions of + 2.5μm (+ 1/40,000) have been demonstrated at speeds far beyond the limitation imposed by an optimum servo control. A comparison is made of scanning times at various precisions; results indicate that high accuracy and precision can be attained without materially sacrificing system speed. Basic to the operation of the deflection apparatus is an optical position monitoring capability and a unique control philosophy that drives the deflectors in open loop mode. Distortion is compensated by the position monitor and the control logic, so that beam placement has a guaranteed absolute accuracy in the deflection plane. Limitations of the present apparatus will be discussed, as well as possible extensions of precision and accuracy.

Citation Download Citation

D. P. Jablonowski and J. Raamot "Beam Deflection At High Accuracy And Precision", Proc. SPIE 0084, Laser Scanning Components and Techniques: Design Considerations/Trends, (10 January 1977); https://doi.org/10.1117/12.954921

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