Photoresist Exposure - Measurement And Control

Donald B. Novotny

doi:10.1117/12.954827

20 September 1976 Photoresist Exposure - Measurement And Control

Donald B. Novotny

Proceedings Volume 0080, Developments in Semiconductor Microlithography; (1976) https://doi.org/10.1117/12.954827
Event: Developments in Semiconductor Microlithography, 1976, San Jose, CA, United States

Abstract

Single parameter irradiance measurements commonly used for the determination of photo-resist exposure times are incapable of giving unique values of either the broad band irradiance from a mercury-arc lamp, or the photoresist exposure times. Resolution of these measurement incapabilities through a series of irradiance measurements of narrow, approximately monochromatic radiation bands is discussed. A basis for establishing photoresist sensitivity indices that can be used to calculate. unambiguous exposure times by applying Van Kreveld's additivity law to these narrow band irradiance measurements is suggested. The thickness variation of photoresist films is included in the method of calculating exposure time. Conditions that may simplify the calculations of exposure times or reduce the number of irradiance measurements when a mercury lamp is used as the exposure source are discussed. Suggestions are made for the use of these indices as photoresist specifications, and for the real-time automatic monitoring and control of exposure times in wafer fabrication where optical density variation in the photomasks and thickness variations in the photoresist films are automatically incorporated into the control by a microprocessor.

Citation Download Citation

Donald B. Novotny "Photoresist Exposure - Measurement And Control", Proc. SPIE 0080, Developments in Semiconductor Microlithography, (20 September 1976); https://doi.org/10.1117/12.954827

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available