In the last several years, femtosecond laser processing using GHz burst mode, which consists of the ultrashort laser pulse (intra-pulse) trains with the pulse-to-pulse interval of several hundred ps, has attracted much attention, as it can achieve higher-processing quality with enhanced processing efficiency than the conventional femtosecond laser irradiation scheme (single-pulse mode). However, most of the research using the GHz burst mode was aimed at ablation. In this study, we extend the GHz burst mode femtosecond laser processing to the formation of laser-induced periodic surface structures (LIPSS) to explore the possibility of novel nanostructuring, over the single-pulse mode.
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