Presentation
3 October 2022 Influence of dopants and defects on the optical and structural properties of Zirconium Nitride
Author Affiliations +
Abstract
Transition metal mononitrides (TMNs) like ZrN—which shows uniquely and drastically chemically tunable properties such as permittivity, carrier concentration, structure, hardness, and heat capacity—have arrived as frontrunner plasmonic and nonlinear optical material alternatives to Ag and Au. The influence of dopant atoms and defect states on the permittivity and structural properties in ZrN chemistries, as well as a broadband epsilon near zero (ENZ) regime spanning the visible wavelength range and into the near infrared are demonstrated. Reasons why progress in ZrN (despite its attractive features) lags that of TiN are discussed and related to defect and impurity states in precursor materials.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven Bopp and Zhaowei Liu "Influence of dopants and defects on the optical and structural properties of Zirconium Nitride", Proc. SPIE PC12197, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XX, PC121970N (3 October 2022); https://doi.org/10.1117/12.2633607
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KEYWORDS
Zirconium

Chemistry

Gold

Plasmonics

Optical testing

Silver

Sputter deposition

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