Wide-range parameter variable ultrashort pulse laser processing of glasses

Aiko Narazaki; Dai Yoshitomi; Hideyuki Takada

doi:10.1117/12.2609453

1 April 2022 Wide-range parameter variable ultrashort pulse laser processing of glasses

Aiko Narazaki, Dai Yoshitomi, Hideyuki Takada

Proceedings Volume PC11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII; PC1198802 (2022) https://doi.org/10.1117/12.2609453
Event: SPIE LASE, 2022, San Francisco, California, United States

Abstract

Ultrashort laser processing has great potential for precise microfabrication of transparent materials. For optimizing laser parameters, the quick survey of laser parameters is vital. We have developed Yb-doped fiber chirped-pulse amplification system that can control various laser parameters in a wide range (pulse duration: 0.4 to 400 ps, etc.). The laser micro-drilling and imaging under 450 conditions were performed for about 0.5 hour, the 2D mapping of ablation volume with pulse duration and fluence was also accomplished by automatic confocal laser scanning microscopic measurements for several hours. The fast and comprehensive survey of ultrafast laser processing of glasses was demonstrated.

Conference Presentation

Citation Download Citation

Aiko Narazaki, Dai Yoshitomi, and Hideyuki Takada "Wide-range parameter variable ultrashort pulse laser processing of glasses", Proc. SPIE PC11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII, PC1198802 (1 April 2022); https://doi.org/10.1117/12.2609453

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