This PDF file contains the front matter associated with SPIE Proceedings Volume 8416, including the Title Page, Copyright information, Table of Contents, and the Conference Committee listing.

The next generation ground-based giant telescope, the European Extremely Large Telescope (E-ELT), under development by the European Southern Observation (ESO) ¹, will have nearly 1000 hexagonal segments of 1.45m across the flats. Fast processing of these segments with high form and edge specifications has proven to be a challenge. The Zeeko Precessions sub-aperture bonnet polishing plays an important role providing capability for polishing the surface and correcting the form to meet this target ^2,3. BoX^TM grinding has been adopted. This technology has the advantage of fast generating of aspheric surface with very low subsurface damage (SSD) ⁴. This will avoid the need of removing thick layer of stock at polishing stage to remove SSD. However the result grinding signatures has proven to be problematic for direct polishing with Zeeko’s standard bonnet technology. A novel ‘grolishing’ process which stands between ‘grinding’ and ‘polishing’ has been developed to deal with mid-spatial features left by BoX^TM grinding. This tool is designed base on Zeeko’s R80 bonnet which will fits directly into the company’s IRP series machines. The process parameters have been optimised to have signatures less than 10 nm PV. The edge profile is 1μm upstand within 40 mm edge zone. The ‘grolished’ surface can be directly pre-polished together with all the form corrections. To meet the fabrication time target, R160 bonnet is used with 50 mm polishing spot, this will provide removal rate of 9.8 mm³/minute, which can be employed at pre-polishing stage and some form correction. Process parameters have been developed to leave slow upstand at edge zone without any form of sharp edge downturn. The following form correction stage, which employs smaller polishing spot of about 20 mm diameter, will continue to remove form errors of spatial frequency between 0.02 – 0.05 1/mm. Furthermore, the upstand edge will be, to a large part, removed at this stage. It is demonstrated that the form specs can be achieved after this process. The following smoothing process will improve surface textures and remove edge errors. Local edge rectification is normally necessary to bring the edge at same level. A final smoothing process will bring the bulk area and edge zone to meet all the specifications.

In the last two decades, precision glass molding is gradually becoming a competitive hot-replicating manufacturing technology for precision glass optical components such as aspherical lenses, lens arrays and freeform lenses. During the process, however, different factors may cause shrinkage errors on the final lens shape and index drop which affect the optical performance of the final molded lens. Currently, such errors have to be compensated by time-consuming and cost intensive iteration loops featuring tryout molding and mold revising. In order to avoid this iteration process in precision glass molding, an integrated numerical simulation tool developed at Fraunhofer IPT is introduced in this paper based on several case studies, which can be used to provide optimized mold design, process design and automated mold compensation of the mold insert. In this process simulation, the entire molding process, including the heating, molding and cooling steps, are precisely described by a combined thermal and structural model. Generalized Maxwell Model is used to describe the complex stress and structural relaxation behavior of the glass, and detailed test series are conducted to acquire precise knowledge about the material properties of optical glass. In this way, the deformation of glass pre-forms during the molding phase and thermal shrinkage of the molded glass optics during the cooling phase can be precisely predicted in the process simulation. Based on this information, a compensated contour layout for mold inserts, as well as an optimized process parameter set can be defined in advance and directly applied to the initial mold inserts during manufacturing, so that the challenging practical integration is eliminated. Further more, a 3D process simulation has also been successfully developed for the prediction of pitch error of molded glass wafer optics. With the motivation to adapt this simulation approach to the requirements of industrial applications, a Graphical User Interface was also developed. With this GUI, The customer will be able to use this interface to perform simulations of his own without technical knowledge of the finite element method (FEM). The positive feedback from customer shows that the developed flexible and reliable numerical simulation is a useful tool to reduce the development cost and enhance the performance of precision glass molding for industrial application.

Aspheric surfaces can provide significant benefits to optical systems, but manufacturing high-precision aspheric surfaces is often limited by the availability of surface metrology. The lack of 3D surface data required to drive aspheric manufacturing equipment can create risk and unwanted variation in the manufacturing process. One typical approach to gathering this 3D data is using dedicated null correction optics in addition to the interferometer itself. However, the cost, lead time, inflexibility, and calibration difficulty of such null optics makes interferometric aspheric testing a far less attractive solution than the relatively simple spherical test. Subaperture stitching interferometry was originally developed to allow for the full-aperture 3D measurement of large-aperture spheres and flats using commercially available interferometers and transmission elements^{1, 2, 3} The method was then extended to the measurement of mild aspheric surfaces, by exploiting the local best-fitting and magnification of the high density fringe patterns associated with nonnull interferometry.⁴ Subaperture stitching interferometry was then extended by an order of magnitude through the use of a Variable Optical Null (VON) that allowed the measurement of high-departure aspheres. The automated VON has an optical system with a range of motion control that generates an optical wavefront that closely matches the surface of the asphere for each subaperture. The residual wavefront error is measured with a standard interferometer, and the fullaperture surface profile of the asphere is reconstructed using advanced stitching algorithms. This method allows for the accurate measurement of aspheres with more than 1000 waves of departure from best-fit sphere, without the use of dedicated null lenses.

In order to seek the reasonable Laser forming process parameters of TC4 titanium alloy, and to control forming quality, based on the element life and death technique of finite element methods (FEM), detailed numerical simulation of single track and multi-layer temperature field of TC4 titanium alloy during laser rapid forming was conducted with ANSYS parametric design language (APDL). And get the distribution of temperature field and temperature gradients. The calculated results show that the distribution of temperature field changed with the movement of laser beams and the heat affected area have been expanded along with the increase of the scanning time, temperature increase gradually and temperature gradients obviously changed in molten pool area. The temperature gradients in sample are mainly along deposition direction. In the end, carry on an experimentation research testing and verifying according to the simulation parameters, proof that the results can meet the actual situation analysis results, and forming a sample with good performance.

Ultrasonic vibration assisted machining with harder abrasives than the material to be machined can improve the quality of machined surface and manufacturing efficiency. Therefore, we integrated ultrasonic vibration (UV) into a recently developed technique chemo-mechanical bound-abrasive polishing in anticipation of further increasing the material removal rate (MRR) and/or surface roughness. The preliminary results indicate that ultrasonic vibration assisted chemo-mechanical bound-abrasive polishing can lead to increased material removal rate of manufactured optics while leaving the surface roughness comparable to conventional chemo-mechanical bound-abrasive polishing. The great MRR is attributed to the superiority of UV-assisted chemo-mechanical bound-abrasive polishing in discharging resultant swarf during machining.

A large ion beam figuring plant which can process up to 1.5m mirror in diameter has been developed. The plant adopts five axes scanning mode. The mirror with which the five axes scanning system is set face to face is placed vertically when working that can reduce the adverse effect of the flour dust to the mirror and the ion source. The mirror and the five axes scanning system are installed on two doors respectively. The open-close type of the door is a hanging bridge type. And the door will be horizontal when completely opening that will be convenient for installing the mirror and maintaining the system. Two software which are used for calculating the dwell-time and controlling the five axes system are programmed. The five axes system will always keep normal direction following when working.

To breakthrough the choke point on an optics and photonics system research and development, to achieve the thorough optimization on system, approach to theoretical limited, and upgrade innovation ability. Advanced global optimization methods are studied systematically in a great level. The three main elements of optimization, that is model parameterization, optimization algorithm and merit function, base on this, the relationship among them and their reciprocity is defined and analyzed in detail.

Numerical-controlled (NC) micro-jet supersmooth polishing technology is a new non-contacting polishing method developed on the base of the float-polishing. In this paper, both the theory and the techniques about this new polishing technology are introduced in detail, and the surface of fused silica was polished, white-light interferometer (WLI) and atomic force microscope (AFM) were used to measure the evolutions of waveness and roughness during the fabricating process. No new scratches were produced when the nanoparticles removed the atoms away from the surface. The roughness decreased monotonously with the removal of subsurface damage layer. And ideal supersmooth surface without scratches was achieved with waveness less than 0.2nmrmsRMS while the high-spatial frequency roughness less than 0.1nmrmsRMS (sub-angstron).

This paper shows the removal rate and lifetime data of glass lapping process using 3M fine grade Trizact^TM Diamond Tile abrasive pads. 3M fine grade Trizact^TM Diamond Tile abrasive pads is a structured fixed abrasive grinding technology developed by 3M Company, it consists of a polymeric binder and diamond composite that is used with a water-based coolant. It can be applied in both single and double side grinding applications. Grinding results of ‘Fine Grade’ and ‘Super Fine Grade’ Trizact^TM Diamond Tile abrasive pads on Corning Gorilla^TM glass are presented. For ‘Super Fine Grade’ Trizact^TM Diamond Tile abrasive pads, the ductile lapping model is generated when lapping.

Modern optical systems require high quality and compaction at the same time. Steep aspheric mirrors are more and more widely used due to its excellent optical property and high compact structure, but they also put new challenge to optical polishing machine and polishing technology. A novel offset tool axis method is presented to improve the old machine’s polishing ability of steep aspheric mirrors and make good use of the old machine. The simulation shows the offset tool axis method can alleviate non-uniformity distribution of pressure between polishing tool and workpiece, while it also shows the method can enhance the stability and controllability of the polishing process. The pseudo ρ-θ scanning method which combines merits of raster scanning and spiral scanning is presented for offset tool axis method. A 475mm diameter RB-SiC mirror with a relative aperture of 1:1 is polished and surface error reduces to 0.175λ (PV)/0.009λ (RMS) from 0.527λ (PV)/0.079λ (RMS). The result proves the feasibility of the offset tool axis method and pseudo ρ-θ scanning method.

The importance of presbyopia is that it affects 100% of people at their late adulthood and it starts to show up at 40s. The market for high quality progressive lenses is very large. There is a growing need for freeform progressive lenses with a small interval of degree to provide a clear and comfortable intermediate vision for presbyopic patients. Due to the lack of adequate design and manufacturing capability, most of the freeform progressive lenses are designed and imported from overseas at a high price and with long delivery time. This paper presents an integrated approach for supporting design, fabrication and measurement of freeform progressive lenses. A prototype of an integrated system has been developed based on key technologies including an advanced optics design method, computer controlled ultra-precision polishing (CCUP), precision injection moulding, as well as a new freeform surface characterization method. A prototype system has been built and experimental verified successfully through a series of experiments. Successful development of the system will provide an important means for optometry research of freeform progressive lenses.

A new design is proposed according to the requirement of a 5-axis ultra-precision machine tool for optical manufacture. This investigation was performed to see how the different configure styles influence the static performance characteristics of externally-pressurized air bearings with orifice, such as load capacity and stiffness. Based on the static performance characteristic analysis, the optimum design is done for the externally-bearing system. Finite difference method was used to obtain the numerical solution of Reynolds Equation. Load capacity was the integration of Pressure over the solution area, while the stiffness is the derivative of load capacity to gas film thickness. The load capacity of the externally-pressurized bearing grows with the increase of supply pressure and goes up with the increase of eccentricity of shaft relative to the bearing; the stiffness turns out to be tough with high supply pressure. The stiffness gets a maximum at zero eccentricity of the spindle, and gradually reduces with the increase of the eccentricity. It has proven that there exists an optimum gas-film clearance where maximum value of stiffness is obtained. There is also an optimum gas-film clearance for maximum load capacity. It should be noted that these two values is different. The restrictor throat diameter has an important influence on the stiffness and load capacity, both of which go down while larger diameter is in use. It can be concluded that there exists an optimum gas-film clearance for aerostatic bearing-rotor system. More attentions should be paid on supply pressure, gas-film thickness and orifice diameter to obtain a spindle of good performance.

Combination technology of MRF and sub-aperture smoothing in off-axis asphere manufacture was researched. The asphere polishing with computer control polishing is not very deterministic , as removal rate of computer control polishing is variation over time in asphere polishing due to the tool misfit, pad wear, or slurry variation. Magnetorheological Finishing is deterministic, subaperture finishing technology in asphere manufacture, but it is limited to smooth mid-spatial-frequencies and high-spatial-frequencies. An example was given in a 290mm circle aperture offaxis aspherical optic polishing process with combination technology of MRF and sub-aperture smoothing. The final figure error was λ/50 rms from the initial 0.8λ rms. The result shows that the combination technology is practical and have high convergence efficiency.

Annealing is an important method to alter the properties of thin films. The effects of thermal treatment in air on optical properties of SiO₂ thin films were investigated. SiO₂ thin films were deposited on Si (110) substrates by an ion beam sputtering (IBS) technique, and then annealed in air under different thermal annealing time of 16 hours, 24 hours, 36 hours, 64 hours and the temperature from 100℃ to 600℃ with 24 hours. Optical properties refractive index and thickness are studied directly after deposition and after thermal treatment, and they are measured by spectroscopic ellipsometry. When the thermal annealing temperature was fixed at 300℃, the refractive index of SiO₂ films would reduce with the increase of the thermal annealing time, the optical thickness also reduced but the various quantities are almost the same. The refractive index of SiO₂ films changed with the different thermal annealing temperature. As the annealing temperature increased, the refractive index of SiO₂ films reduced gradually. When the selected annealing temperature is 500℃, the refractive index of SiO₂ films reached minimum. It can be found that the optical properties of SiO₂ thin films can be improved by an adapted annealing procedure.

UVC (Ultraviolet-C), UV (240nm-280nm) will be absorbed by the ozone layer and unable to reach the Earth's surface when passing at the atmosphere, so the study of this band is important to the military, communication and industry. This paper begins with coating design theory, proposes a new way of filter film design based on the material properties, coating optimization design, testing technology and so on. We intended to use mixture materials, graded-index of material design method for coating design and preparation. Based on these theories to research high performance UVC filter film of high transmission rate, high reliability and good adhesion. UV filter film is widely used in ultraviolet warning, communication and guidance. It has great significance and broad application for both military and civil use.

In this paper, Polyurethane-imide (PUI) which has the advantages of polyurethane and polyimide is synthesized and introduced to apply in the slab optical waveguide devices. The PUI is characterized by infrared spectrum (FT-IR), differential scanning calorimeter (DSC) and thermal gravimetric analysis (TGA). Slab optical waveguide is prepared via spin coating the cyclopentanone solution of PUI on top of K9 glass and cured at 140 °C for 20 minutes to complete removal of the solvent from the film. The film-formability of PUI is characterized by atomic force microscope (AFM). The results of DSC and TGA indicate that the PUI exhibits high thermal stability up to its glass-transition temperature (Tg) of 206 °C and 10% heat loss temperature of 310°C. Optical properties of absorption behavior and propagation loss are investigated in slab waveguides, and propagation loss of 1.782 dB/cm at 1310nm in TE (transverse electric field) mode has been achieved by using prism-coupler method. The results show that polyurethane-imide has distinct merits: good processability, high thermal stability and moderate glass-transition temperature, excellent film-formability, and low propagation loss. These advantages of polyurethane-imides make them suitable as electro-optic polymeric materials in integrated optics.

Design and development of small field ArF lithography system can achieve the prospective studies and key technologies for industrial lithography with low cost. An illuminator has been designed for the ArF projection lens which has a specification of 0.75 numerical aperture (NA), 70μm×70μm image field and x40 reduction ratio. The illuminator consists of 3 parts: fly’s eye, condenser lens and beam shaping unit. A design method based on the fly’s eye, which is the core and starting point, has been proposed. At first, the basic structure of fly’s eye has to be determined. Then the first order of the condenser, such as focal length and the diameter of the stop can be derived when both the field size and illumination NA are guaranteed. At last, the stop diameter is used as the goal of the beam profile exiting from the beam shaping unit. Thus the initial parameters and relationship between various units in the illuminator can be determined. This method can also be used in full field system design. The NA of the illuminator (NA _ILL ) in the reticle space is 0.01875 and the illuminated area is 4mm×4mm. The telecentric degree is smaller than 6mrad, which guaranteed that the exit pupil of the illuminator match the entrance pupil of projection lens well. The illumination uniformity can reach 1.125% RMS (Root-Mean-Square) over the reticle with LightTools^TM. The results show that all the parameters meet the requirements of the small field ArF lithography system.

To achieve a high accuracy of optical freeform surfaces, it is necessary to conduct a repetition of measurementcompensation. Filtering is a key procedure in the loops to extract the actual form errors and then to generate compensation path. Although spline filter is an efficient approach, it has poor robustness when the data contains outliers. A modified spline filter is introduced in this study to enhance the robustness by a preprocessing procedure based on the M-estimation theory. The cascaded approximating method is also applied to reduce the deviation to Gaussian filter in the amplitude transmission characteristic. The 2D spline filter is also developed to process the 3D measured data of optical freeform surfaces. The effectiveness of this newly proposed method is verified by the experiments.

Fine control of Optical Thin Film Stress is critical to develop an expected profile parameters of large aperture coated optics. In our latest effort, the evolution of stress and force per unit width of multilayer thin film formulas, (H2L)⁶, (H2L)⁵H and (HL)⁷, consisted of HfO₂ and SiO₂ were researched. The stresses of SiO₂ single layers deposited on the HfO₂ were small than those grew on glass and get smaller as the multilayer thin film deposited. While the stresses of HfO₂ films deposited on the SiO₂ were positive correlation with the stress of SiO₂.

An on-line condition monitoring and monitoring point position visual system for grinding machine is developed for monitoring the grinding condition in a grinding operation. This system can set and observe the monitoring point position in computer, measure the vibration and temperature of the grinding machine to judge the operation state. The experiments indicate that the visual system described in this paper is more adequate than conventional on-line monitoring techniques.

High performance narrow band-pass filter(NBF) designed for dual-band infrared(IR) detectors of near-infrared(NIR) and mid-wavelength infrared(MWIR) application is presented. As the part of dual-color filters, the filter features a high transmittance at the center wavelength of 1.55μm and a broadband rejection out of the pass band from 1 to 5μm. The pass band need to be centered in 1.55±0.03μm, have a full width at half maximum of less than 0.055μm and maximum transmittance higher than 75% when measured at normal incidence. Thin-film design for the filters is investigated in detail and two kinds of multilayer schemes are obtained by computer optimization. Both consist of a fundamental narrow-band filter of Fabry-Perot cavity with Si/SiO₂ and Ti₃O₅/SiO₂ as the material pair, respectively, and three edge filters with the material pair of Si/SiO₂ for wide band rejection. Moreover, the preparation of the filters have been given, including the deposition parameters and especially, the optical thickness monitoring of the stack of Fabry-Perot cavity. Finally, the filters meeting the requirements are accomplished and characterized, which have the peak transmittance of about 82%, a full width at half maximum of 0.050μm and a broadband rejection with the average transmittance lower than 1% from 1 to 5μm.

The Computer-Controlled Optical Surfacing (CCOS) technology is widely used for making aspheric mirrors, because of its high accuracy, simple process conditions, low cost and other merits. The characteristic of the removal function of a polishing tool is a fundamental factor in determining convergence rate in CCOS process. The ideal removal function in CCOS shows a Gaussian-like character which has the maximum removal at the center and gradually reduces to zero with the radius increasing. In this paper, we present a novel approach to get an ideal removal function by tri-rotors machinery. According to the Preston equation and time-sharing synthesis, we established mathematical models in the modes of trirotors movement. Through the simulation based on the emulated material removal function, we get the polishing process technological parameter. Then the experimental setup and results are given. The practical process proves that the result is basically equal to the simulation result, which validates the feasibility of this simulation optimization method and has a certain degree of guiding to practical process.

Along with development and progress of modern optics manufacturing technology and optical test technology, there are a series of modern polishing technologies based on the application of computer software and hardware, such as CCOS(Computer Controlled Optical Surfacing), Stress Lap Polishing, Magnetorheological Finishing, Ion Beam Milling, etc. The emergence of these new technologies promotes aspherical mirrors widely used in optical system. Vacuum evaporation technique is applied widely on making optical coating. In this paper, we discuss the feasibility on applying vacuum evaporation technique to making large-size aspherical mirrors. The technology is to take original sphere as substrate, deposit film of certain thickness distribution on the surface, then get aspherical mirror. This technology has a special advantage and tremendous development space in the off-axis aspheric processing, silicon carbide aspheric surface processing and modification, super-glossy aspheric processing and great telescope mirror batch processing.

As the development of modern optical technology, especially space optical science, more high precision mirrors with large apertures are needed. But it is difficult to manufacture high precision large aperture optical components. The method of optical polishing using an ultra-precise bonnet is based upon the technology of computer controlled optical surfacing. A bonnet filled with air is applied as a precise polishing tool which is flexible and able to adapt itself well to the shape of the part, which is superior to other polishing methods. A material removing model of bonnet precessed polishing is established according to kinematic principle based on the Preston equation. The model is modified in terms of Hertz contact theory using the physical characteristics of polishing bonnet tools. A satisfactory result was obtained for one of the surfaces of a wedge mirror with a diameter of 570mm. The resulted PV and RMS parameters are 1/8 λ and 1/75 λ respectively.

The precision-compression molding (PCM) method is widely used for the production of lens-arrays. In this paper, the PCM process for spherical glass-lens arrays was investigated by the finite element method (FEM). From the investigations of the distribution of residual stress, the optimum PCM parameters, e. g. the molding temperature, the molding time and the thickness of glass blank, were obtained, which were found to be 570 ℃ ,114s and 6μm, respectively.

Recently, national optics technology has been developed rapidly, and the optical system is the important payload of the space remote sensor, whose quality determines the transmission cost. The camera should have a minimum size and quality under the premise of ensuring better imaging quality of the optical system. This requires the camera has a sufficiently high dynamic and static stiffness and strength, meanwhile its optical system has the maximum degree of lightweight. Lightweight process of the camera primary reflector is the most basic and important key techniques.

In this paper, the application background of anti-IR thin films for resin lens is outlined. SiO2 and Si3N4 are chosen as coating materials. Mid-frequency pulse magnetron sputtering is adopted to prepare the thin films. Deposition rate is calibrated by fitting the measured transmission spectrum of high-reflective thin films, which can improve the precision of film thickness monitoring. Anti-IR thin films and visible range anti-reflective thin films are successfully deposited on the convex and concave surface of CR39 resin lens, respectively. The spectral properties, surface morphology and microstructure of the deposited thin films are characterized by ultraviolet-visible spectrophotometer, scanning electron microscopy (SEM) and atomic force microscope (AFM), respectively. The results show that the averaged transmittivity of the resin lens after coating exceeds 97% in 420~680 nm, and is below 55% in 800~1350 nm at normal incidenct angle. Anti-IR thin films have a uniform distribution and compact microstructures on the lens.

The tool path generation based on iso-phote is a kind of feature based path generation method. Iso-phote curves represent the characteristic curves on a parametric surface. Accordingly, iso-phote based tool paths has been proposed as an important path pattern for parametric surface machining. An adaptive interpolation method for tool path generation based on iso-phote interpolation for wedge/aspheric lens element grinding was proposed, which takes into account the symmetry problem of wedge/aspheric process behavior. This paper presents an efficient interpolation method for tool path generation approach based on iso-phote curves and bisection method. By the application of parallel grinding, the approach can guarantee the feature of aspheric lens, maximize machining speed and smooth the machine operation for high surface quality. The interpolation method guarantees that step length of the interpolated points always keep the precision. The method can improve and automate large scale wedge/aspheric lens element grinding for 3-axis CAD/CAM systems. As part of the validation process, the tool paths generated and interpolation error are analyzed and compare with the traditional method.

This paper presents vehicle anti-tank missiles goniometer system design plan, focuses on the goniometer system is the main technical parameters of the design, including field and accuracy, sensitivity and anti-interference ability, In order to clarify goniometer works and ultimately the target of optical tracking angle design integration with the goniometer, and resolution of the missile deviated from the line of sight of the angular deviation and the angular velocity of rotation of line of sight measurement problems, the missile in flight to achieve change to correct the missile's flight deviation, hit the purpose of the target.

The influence of substrate rotating on the microstructure and surface morphology has been investigated on Ge and Si film. In this paper, the Ge and Si optical thin films were chosen to be research objects. The thin films were prepared on Al₂O₃ substrate by electron beam evaporation in about 5×10_-4 Pa vacuum pressure in two deposited methods: rotating substrate and not rotating substrate. The films were observed and analyzed by X-ray diffraction analyzer, scanning electron microscopy and atomic force microscopy. According to the wavelength deviation dispersion theory, the packing density has been calculated. The results show that: in the two deposition methods, the films both are non-crystalline state and compact, the film surface morphology is basically same and no significant defference in surface roughness, but the film on no rotating substrate has higher packing density.

Optical wedge is the common optics in optical system and has been widely applied in the photo-electrical collimators. This paper systematically analyses and sums the fabrication method of controlling wedge angle accuracy, exact measurement of wedge angle, distinction between basic and inclined phanes and their markings, angle control and cylindrical disalignment of double-glued wedge as well as its proper assembly and testing. From the viewpoint of wedge design, manufacture, glue, assembly and testing, some attentions and solutions were proposed to assure high quality, high machining efficiency and assembly reliability so as to provide excellent performance in photo-electrical stabilized sight systems.

Based on the motion relationship of abrasive and workpiece, the abrasive kinds and the crucial parameters in rough lapping, fine lapping, rough polishing and fine polishing were established through a lot of technology experiments firstly in this work. The exploring experiments indicate the high quality surface of SiC plane reflector can be finished in short time. Secondly, the validation experiments were performed on the large scale SiC plane mirror with a size of 225×172 mm². As a result, the machining flow sheet was erected. Moreover, the machining tool, abrasive kinds, abrasive size, processing methods and testing solutions were all assembled in response to the flow sheet. The finished of 225×172 mm² SiC plane mirror was tested and evaluated. The results show that the surface figure error, i.e. PV, is 0.0117μm, and the surface roughness RMS is close to 0.68nm.

An approach for rapidly polishing aspheric with large area polishing tool is presented. Then the principle of large area polishing is analyzed. Finally, by studying in the trials with the analysis results, the effects of the changes in major parameters such as speed and swing angle on the aspheric surface quality are summarized. The trials showing that using large area polishing tool to polish aspheric will make the surface roughness and profile in rapid convergence, and shorten the periods of machining high-accuracy aspheric.

With the development of science and technology, the requirements for optics have become higher and higher in photoelectric instrument industry. And therefore, the fabrication and measuring processes of large viewing field and complicated toric lens were investigated in this work. Based on the classical manufacturing method, the blank preparation, lens mounting, polishing operations as well as the inspections were all studied in detail and summarized. Finally, the feasible processing procedures were established, with which the fabricated lens could meet the application requirements.

In the paper, the ballonet polishing process was introduced to fabricate the aspheric surface. And then the principle and structure of ballonet polishing tool are narrated firstly. Subsequently, the effects of the process parameters such as radius and size of the ballonet tool on aspheric optical component profile and polishing efficiency are analyzed in theory, and a mass of polishing experiments are carried out on a complex aspheric to validate them. Finally, the influencing rules of such effects of the ballonet polishing tool’s radius and size on the surface figure and efficiency in polishing aspheric optics are summarized. Moreover, the optimal technological parameters are achieved, which provide with significant references for practically machining different rotary symmetrical aspheric optical components.

Diffuser film is one of the main components in liquid crystal display backlight unit. It can cause strong scattering for the light out from the light guide plate, and it have the ability to make diffuse reflection and uniform diffusion of the out light occur. How to improve the brightness, the uniformity of backlight unit, and make it more and more slimmer are not only what manufacturers pursuit to, but also an hotspot recently. In this paper, we make use of the statistical analysis law of laser speckle to achieve the fabrication of diffuser film. According to the requirements for the technical parameters of diffuser film, the structure characteristics of laser speckle and manufacturing methods are analyzed and discussed in detail. They consist of producing the original edition of the laser speckle figure (Photoresist board was used as recording medium to produce embossment laser speckle images, and this is one of the most important process in moulding technology ), using electricity molding system to manufacture metal formwork (It is also called as electrotyping, which is transfer the embossment speckle image from the photoresist board to a metal plate), and moulding replication (In a certain temperature and pressure, template stripes were transferred to the film). The diffusion light uniformity and brightness can be controlled via adjusting intensity distribution and average diameter of the speckles. Then the preliminary experiment results are given under laboratory conditions (argon ion laser, λ=457.9nm), and meanwhile the effects of several common diffuser films are compared in this paper.

The method of bonnet polishing is successfully used to polish an aspheric surface with an aperture of 200 mm and a maximum departure of 700 μm. Based on the principle of bonnet polishing, we employ one IRP 600 machine to finish the aspheric surface which was previously ground to an asphere by Satisloh. According to the analysis of error map obtained by the help of CGH after each iteration, several technological parameters are well verified and the whole precession process is proved to be under good control when the material to be polished is fused silica. With total 12 iterations of 30 hours including 5 pre-polishing iterations and 7 corrective iterations, the surface form accuracy of 80nm (PVq) and 15nm (RMS) over the full aperture is achieved. The results indicate that bonnet polishing can not only realize good form accuracy, but also eliminate a certain mid-frequency effect left by grinding.

Bonnet polishing system is mostly used in rough polishing and fine polishing because of its own features. Due to different aims of polishing stages, optimal ranges of key parameters are different in various polishing stages. Simulations in ANSYS are present in order to get optimal ranges of key parameters including inner pressure P and compression of bonnet H in different polishing stages, firstly, the reliability of simulation of bonnet polishing using ANSYS is verified through a series of simulation about fine polishing stage, on the condition of using ranges of key parameters got by former researchers from polishing experiment; secondly, simulations about rough polishing were carried out, and optimal ranges of key parameters were found, which have reference value in future work.

In this paper, a POF connector based on a two ball lens system is researched. To analysis the coupling efficiency of the connector, a numerical model was established using ray tracing method and four defects of transverse offset, longitudinal offset, angular misalignment and gap between two ball lenses in the coupling system are calculated. The calculation results show that the POF connector based on a two ball lens system can improve the coupling efficiency between two fibers and has good tolerance to the connection defects of transverse, longitudinal and angular misalignments.

In order to estimate the ability and quality of high-resolution linear CCD optical remote sensing satellite in advanced, the flat terrain and urban region with high buildings were selected as the experimental region. For flat terrain, the data source for simulation was DEM and existent orthography. For the urban region, the data source was 3D models. When satellite image was simulating, the imaging model was the principle of line perspective and typical geometrical error in the sensor system was considered. The radiation transmission of imaging was analyzed and realized with the look-up table which constructed by 6S radiation transmission model. Finally, the simulated image of geometrical distortion rules was examine by experiment, and the results shows that the imaging simulation can achieve very good performance.

Infrared dome is one of the key components of an infrared guidance vehicle. The optical properties of the dome such as transmission rate, type size and precision will affect directly the detector performance and impact ultimately on the system, therefore the optical manufacturing process of infrared dome plays an important role. In this paper a general optical manufacturing process of infrared dome may be analyzed and modeled by object-oriented Petri net (OOPN). Based on the performance analysis, the model boundedness can be verified, the processing production efficiency, the utilizing efficiency of the equipment and other statistical results can be achieved to improve the manufacturing process. The OOPN method simplifies the model effectively, at the same time the model is easy to be analyzed and has good reusability and extensibility. Studying on optical manufacturing process of infrared dome is not limited to the specific types of materials, the modeling result can be used by the same operation unit.

There are several techniques to measure the precise structure parameters of human eye in vivo. The design methods and match of ophthalmic lens should be developed to accompany with the rapidly growing vision demands. We present a method to design custom aspherical RGP CL(rigid gas permeable contact lens) which corrects high-order aberration of RGP lens and human eye. We did the design by optimizing the aberration of the model consisting of Liou’s model eye and RGP CL, the aspherical surface was placed on the front surface and damped least-squares methods were used for the optimization. The lens designed could be manufactured in normal conditions and the wavefront aberration was reduced to get much better vision experience. It might be one important way of custom design and match of RGP CL.

Manufacture and testing research on a refractive-reflective meniscus primary mirror with a central obscuration is presented. The two surfaces of the primary are both designed as spheres. Because of the index homogeneity, one of them has to be a free-form surface relied on the distribution of homogeneity. The primary is tested with a compensator. There is a difference between the optical paths of the primary of working status and testing status. The tolerance of mid-frequency error of the concave surface ranged from spatial period of 1.82mm to 0.39mm is tight so that the testing result can represent the performance of the primary. The core cut from the primary was cemented and manufactured together with the primary. The concave surface was manufactured to be a sphere. The system error caused by mid-frequency error of the concave sphere has reached to 10.3nm (PV). The wavefront aberration of the primary has reached to 126nm (PV).

Non-rotational symmetrical micro-structured surfaces have gained more and more applications in advanced optical systems. To obtain such surfaces with low cost and high efficiency, this paper presents the key technologies for turning of such surfaces including the diamond turning system, tool path generation and tool nose compensation algorithms. The grid based tool path generation algorithm has been proposed for on-line tool path generation. The tool nose compensation is achieved by constructing cubic Hermite interpolation curve which could improve the calculating efficiency greatly. Then several micro-structured surfaces were fabricated and we focused on the analysis of micro lens array (MLA). Height of the spherical cap, diameter of the scope, and the radius of the curvature are evaluated, their maximum deviation from designed values are -2.23%, 2.27%, and 4.29% respectively. This further verified the diamond machining is an enabling method to fabricate high precision non-rotational symmetrical micro-structured surfaces.

Parabolic cylindrical lens was polished with high efficient and precision using a flexible wheeled polished die by CNC polishing machine. A flexible wheel polished die was introduced. The CNC polishing machine has long travel , high speed and precision, so many parabolic lens can be cemented to form a bar for being polished. The effects of the tooling rotational velocity, amount of compression and curvature radius of the workpiece on the profile accuracy were investigated. In the short polishing period, the profile accuracy of the workpieces are less than 0.5 μm achieved by selecting optimum experimental parameters in the experiments. The polishing technology of high efficient and precision achieved by this precessing method is helpful to promote mass production of the parabolic cylindrical lens.

Off-axis three-mirror anastigmatic (TMA) system adopt off-axis aspheric mirror for high resolution telescope. However, residual tooling marks from advanced aspheric fabrication techniques such as computer controlled optical surfacing (CCOS) are difficult to remove. These marks typically in the mid-spatial frequency (MSF), in optical fabrication also named surface band error. MSF will reduce MTF and contrast. This paper using Fourier method to research the relationship between MSF and the reduction, and applies simulation method to analyze the effect of fabrication residual marks on the loss of MTF in off-axis TMA optical system, also analyze the scatter influence of MSF by plot the relationship between surface errors PV/RMS and spot diameter.

For the quarter-width camera system, the optical solutions based on segment prism have been proposed. It can well meet the requirements of the optical system. There are errors in the processing and assembling of segment prism. The tilt of imaging and the eccentric of ray axis are caused by these errors. It may reduce the image quality of optical systems. This paper provides a principle for choosing the separating surface. It can separate the change of the ray path generated by reflector surface error and refractive surface error respectively. The deviation of the ray axis can be calculated through the system of the segment prism. Therefore the segment scheme of the quarter-width camera system is reasonable and practicable.

Surface roughness in Single Point Diamond Turning (SPDT) is affected by a number of factors, which collectively contribute to the final finish of diamond-turned surface. This paper analyzes the dominant factors affecting surface roughness in SPDT. Considering the mechanism of SPDT, the generation of surface roughness is closely related to the material properties of workpieces, especially some material aspects such as anisotropy, impurity, inclusions and microstructures. The conditions of the tool such as the rake angle, the nose radius, the tool cutting edge waviness and the degree of wear exert significant influence on the surface roughness. The cutting process parameters, including the spindle speed and the depth of cut, especially the feed rate, influence the surface roughness as well, and the cutting conditions can be optimized for given materials and workpieces. The usage of mist also have to be considered carefully. Based on the analysis above, appropriate diamond tools are chosen, and cutting process parameters are optimized for particular workpieces, and some successful control of the surface roughness have been achieved for some materials such as Al alloy6061, Si, Ge, and KDP.

The high precision optical mirrors are quite important for the modern optical system. In this paper, a novel Magnetic Medium Assistant Polishing technology and device is researched for optical finishing. The key element of the device is a designed magnetic wheel and accessorial magnetic component. The solid magnetic powder arranged with the magnetic field distribution and became a flexible polishing brush tool. The solid magnetic medium tool working with a high rolling speed and the polishing liquid with abrasive was injected to contact region of the optical surface. The magnetic powder tool is reforming with the magnetic field all the time, and this feature made the removal rate and distribution of the removal function invariable. The device is connected to the polishing machine. The fabrication experiments were completed. The distribution of the removal function is like a raindrop and asymmetry in one orientation. The removal stability of the tool was quite good and achieves 95% sameness of peak value in one hour. The primary experiments shown that the technology can be used in the practical fabrication.

SiO₂ is a very important low refractive index material and usually used in combination with high refractive index material to manufacture the coatings with low optical loss. In this paper, SiO₂ films were deposited on Si substrates by an ion beam sputtering (IBS) technique and SiO2 target with purity of 99.99% was used as SiO₂ thin films forming material. The thickness of SiO₂ films grown onto Si substrates are about 900 nm. Aging optical properties of SiO₂ films were investigated as a function of time placed in the air. Spectroscopic ellipsometry was used to measure optical constants of SiO₂ films. The refractive index of SiO₂ films change with the increase of placed time. When the placed time reaches more than 200 days, the value of refractive index tends to be constant and the corresponding variation rate is about 0.5%. As the placed time increases, the physical thickness and optical thickness also drive to be stabilization. It can be seen that optical properties of SiO₂ films prepared by IBS technique under some process parameters are very stability.

With increasing of the laser power, higher demand for high reflective thin films in cavity is needed. Higher reflectivity is beneficial to obtaining higher output power and reducing the heat from the cavity. The reflectivity of metal substrate itself is much higher, and much higher reflectivity can be obtained through depositing thin film. Due to good thermal conductivity of metal, the thin film deposition on metal substrate is usually used in high power laser system. Due to existing absorption, we must design proper film system structure and reduce the output heat from the laser cavity. Copper was used as substrate material. Optimizing the film system can reduce the absorption. High reflective coatings were deposited on copper substrate by ion beam sputtering. When the operating angles are from 10 to 35 degrees, the obtained reflectivity reaches over 99.5% at 941nm, and the reflective band is wide.

Multi-channel telescope can provide more than one wave band for remote sensing and then improve the efficiency of the telescope. But it will increase the weight and bulk especially when correcting the aberrations with lenses which caused by the oblique plane parallel plates splitters. It is a good method to correct the aberrations with free-form surface while there is no lens to take up large space or to increase the weight. Free-form surface splitters were introduced in an F/3 off-axis TMA telescope with FOV 4.4°×0.2°, four channels such as visual, near wave infrared, short wave infrared and middle wave infrared channels. The image quality is near the diffraction limit in each channel.

In the traditional Czerny-Turner spectrometer, the off-axis reflected light from the spherical mirror including astigmatism due to the different focal lengths in tangential and sagittal planes. A method of using user defined surface (UDS) in CODE V to establish the freeform cylindrical lens to correct the astigmatism is proposed. By adding a freeform cylindrical lens that the curvature radius values at each positions before the CCD sensor, will achieve astigmatism correction during the broadband wavelength from 300nm to 800nm and improves system performance greatly, especially the power collection. Because of the special features of spectrometer that one object point will form multiple imaging points for the grating diffraction, a general auto optimization method offered by the software is valid. By calculating the RMS wavefront error under every worked wavelength, and get the weighted mean, one can use a user defined error function to evaluate the whole system imaging performance and optimize the freeform cylindrical lens. Dichotomization searching method is used during the parameters optimization. Result shows the performance of our Czerny-Turner spectrometer system with freeform cylindrical lens. Compared to the traditional Czerny-Turner spectrometer, the astigmatisms are well corrected and the power collection was enhanced 4.1 times.

With the development of manufacturing technologies of large-scale polymeric micro-patterns, the Roll-to-Roll fabrication has received more and more attention. Its advantages of large area, high efficiency and low cost make this process very competitive. Requirements on high accuracy for functional optical micro-structures impose new challenges for processing precision of the roll stamper. Taking into account the difference between traditional imprinting and Roll imprinting, we build a mathematical model to optimize the tooth shapes of the rolls for compensating the structure distortion during the rolling motion. Squared patterns are adopted to demonstrate the validity of this compensation method. Through simulation and testing, the results indicate that after optimization of structure, the manufacturing accuracy of the polymer structure can be improved by 78.7%.

For the purpose of fabricating off-axis aspheric optics, we propose a 8-axis-polishing machine combined with a testing tower whose height is about 9 m. The proposed polishing machine was designed and analysed by using a well-known finite element method. The eight axes of the machine have a synchronized motion generated by a computer, and each axis was calibrated by a heterodyne laser interferometer or an optical encoder. The maximum capability of the proposed polishing machine is up to 2 m in diameter, and the maximum radius of curvature of the product (optics) is slightly over 7 m. After calibration, the maximum positioning error of the machine was less than 2 μm within a whole 2 m × 2 m area. A typical fabrication result of a φ1.5 m concave mirror was also described in this manuscript.

With the rapid development of remote sensing satellites and remote sensing techniques, the demands of ground resolution of the visible light camera is increasing. In order to improve the resolution of the camera, usually using the large-aperture and long-focal length TDICCD space camera are usually used. The modulation transfer function (MTF) is an important parameter indicating the performance of an imaging system. In the process of testing the modulation transfer function, the result is influenced by environmental factors such as the air turbulence and system weight. This study is focused on improving measurement reliability of modulation transfer function of the large-aperture and longfocal length TDICCD camera test.

For Lens that will be used in photo lithography systems, not only Low Spatial Frequency (LSF) errors, but also Middle and High Spatial Frequency (M/HSF) errors should be corrected to very low level. Ion Beam Figuring (IBF) is believed to be one of the most effective ways that can fabricate lens to especially high surface accuracy; In fact, it has also certain effects on removing errors in higher spatial frequency range. Firstly, the principle of IBF was introduced; Then, Power Spectral Density (PSD) is introduced, which is used to evaluate IBF’s corrective effects on errors in different spatial frequency ranges; Finally, by the use of IBF machine, a convex lens with diameter 90mm was fabricated, and its surface error was improved from PVr value15nm to less than 10nm, measured by Fizeau phase shift interferometer precisely. Also, M/HSF errors were measured before and after IBF fabrication, by White Light Interferometer and Atom Force Microscope separately. The initial and final Power Spectrum Density (PSD) curves of the lens were generated and compared with each other, which shows that IBF technic has really good ability to remove LSF errors, and can also reduce M/HSF errors greatly in the meantime. The results help to evaluate the corrective effects of IBF technic on errors in the full spatial frequency range.

It is impossible to polish the groove or channel’s surface by traditional method. Chemical polishing, using solutions to erode glass, is adopted in this paper with the aim for getting smooth surface. Nature of glass, composition of polishing slurry, type of polishing products, and some process parameters are studied; in the meanwhile, SEM, metallurgical microscope, profile meter and Visible-UV spectrophotometer are utilized. The result shows that the polished surfaces with high quality depend on the buffering effect of polishing solution, high solubility to polishing products, smaller size of generated salt crystal. Also, it is indispensable to select proper temperature, time and removal rate to realize precision polishing.

Contrary to conventional mechanical polishing methods using polyurethane or pitch tool, non-contact polishing technique based on ion beam sputtering provides deterministic and ultra-precision surfacing at any given surfaces. Owing to no contact between a tool and a workpiece, several issues related to tool wear and edge effects can be evitable. Moreover, the atomic level sputtering makes it possible to obtain ultra-precision optical surfaces with a sub-nanometer surface roughness. In this paper, we have simulated ion beam figuring process according to the characteristics of ion beam and performed a simple test.

In order to satisfy the strict requirements of the surface-shapes and lightweight ratios for space mirrors, the following factors for primary mirror and its support are summarized, shape decision, material selection, lightweight methods, support pattern, weight-loss function and thermal stability, according to the special requirement about primary mirror in modern space camera. The design method of lightweight structure and the flexible supporting structure of the primary mirror is proposed. In order to ensure its optical performance, flexible support structure was introduced to improve stress distribution in a variety of conditions. The finite element models for some kinds of lightweight mirror are built for analyzing the influence of the mirror weight on its surface. It satisfy that [PV]≤λ/10, [RMS] ≤λ/40, (λ=632.8nm) with different gravity orientation. The primary mirror structure of the dynamic stiffness was checked by modal analysis of the primary mirror. Finally, according to the experiments, It is proved that the weight, stiffness and surface accuracy of the primary mirror can meet the engineering requirement, and the mirror supporting structure and lightweight is reasonable.

The IR AR coating is of great importance in contemporary optics industry, thus in this theme we investigate deposition processes of anti-reflection coatings on calcium fluoride substrate using ion-assisted deposition, including single layer of ZnSYbF₃ and a multilayer coating of AR. These thin films are produced by thermal evaporation using ion-assisted deposition, and with their optical characteristics measured and calculated, we analyzed the influence of ion source parameters on coatings such as anode voltage, anode current, argon flow, and so on. Based on research upon, we finally put forward the appropriate parameters to deposition antireflection coating on calcium fluoride substrate, in which the anode voltage and anode current play important roles in influencing the index of refraction and extinction coefficient of single layer of ZnS and YbF₃ coatings in the infrared wavelength. Moreover, because of the ambient moisture, the anti-reflection coating deposition only work for ZnS and YbF₃, but a Y2O₃ layer can be added to protect the anti-reflection coating. In the end, we measured the coating with spectrometer and find out its average transmission reached 99.8%, which can satisfy the practical requirement.

The principles of spectral calibration in Lab for Hyper-spectral imager are briefly expounded. The methods of spectral calibration used at home and abroad are investigated, and their advantages and disadvantages are analyzed. The method of spectral calibration is given, and its advantage is introduced. The method for making choices of light sources and the coating of the integrating sphere are proposed. Finally, the influential factors of calibration uncertainty of this method are analyzed.

A stable and predictable material removal function (MRF) plays a crucial role in computer controlled optical surfacing (CCOS). For physical contact polishing case, the stability of MRF depends on intimate contact between polishing interface and workpiece. Rigid laps maintain this function in polishing spherical surfaces, whose curvature has no variation with the position on the surface. Such rigid laps provide smoothing effect for mid-spatial frequency errors, but can’t be used in aspherical surfaces for they will destroy the surface figure. Flexible tools such as magnetorheological fluid or air bonnet conform to the surface [1]. They lack rigidity and provide little natural smoothing effect. We present a rigidity controllable polishing tool that uses a kind of magnetorheological elastomers (MRE) medium [2]. It provides the ability of both conforming to the aspheric surface and maintaining natural smoothing effect. What’s more, its rigidity can be controlled by the magnetic field. This paper will present the design, analysis, and stiffness variation mechanism model of such polishing tool [3].

Pyramid wavefront sensor is a novel wavefront sensor, and its key element is pyramid-shaped refractor. The refractor is placed in the back focal plane of the first lens and its function in the optical system is divided the frequency spectrum, so the quality of vertex and surface roughness of pyramid are the essential points of the system, and high quality pyramid is more difficult to manufacture. In this paper, a set of two 2-side prisms, which is easily to fabricate, to substitute the 4- side pyramid is proposed and tested in experiment. The experiment shows that it is feasible.

This paper presents a semiconductor laser beam shaping system, that can collimate the irradiance profile effectively and package the laser diode(LD) at the same time. Due to the semiconductor LD is a kind of line source, a particular ellipsoidal lens is designed after both the fast-axis and the slow-axis of the laser beam analyzed. Geometrical optics analysis based on the ray tracing method is done and the formulas to calculate the shape of the lens are given. Both the theoretical and experimental result show that the laser beam system works effectively; the divergence angle is reduced to less than 0.5 degree in the fast-axial direction and 1.8 degree in the slow-axial direction. In addition, it is the same process that makes the laser beam shaper and packages the LD by using epoxy resin, which simplifies the manufacturing process and reduces the LD volume greatly. Because of the advantages of small volume, low-cost, high rigidity and easy fabrication, the shaper is of great value in the field of semiconductor LD applications.

The manufacturing technology of high power laser optical elements belongs to the typical extreme manufacturing engineering for its high precision, low defect, more outputs and less cost. In order to resolve the bottleneck of the current manufacturing, this paper introduces a cloud manufacturing service mode oriented high power laser optical elements to realize the digital engineering management within optical product life cycle, and discusses the architecture and some key techniques in this new mode. This cloud manufacturing service mode can allocate the manufacturing resources and capabilities properly, and provide a managing mechanism which is used as need and paid according to need to utilize different resource services anywhere. It is useful for the manufacture of high power laser optical elements to improve manufacturing precision, optical damage resistance threshold and production efficiency.

This paper deals with a new grinding method which adopts a toothed geometry on the grinding wheel for decreasing the hydrodynamic pressure on grinding arc thereby improving surface roughness of a ground surface. Usually, during the grinding process, the fluid generates hydrodynamic pressure which increases grinding resistance which is larger than the net grinding force in extremely small cutting depth. Furthermore, this hydrodynamic pressure worsens wheel rotational balance which affects ground surface topography. Therefore in this paper, new wheel geometry, specifically tooth shape, is proposed on the point of decreasing hydrodynamic pressure effect. Experimental data indicates that the proposed wheel geometry is effective not only on decreasing the hydrodynamic pressure but also improving surface roughness.

In order to achieve efficient processing of high accuracy off-axis parabolic hexagonal mirror, this article describes a research on Computer Controlled Optical Surfacing (CCOS). We focus our attention on four problems encountered in the processing: how to determine the best-fit sphere, how to choose the best tool path, how to build the tool influence function when the tool overhangs the edge of workpiece and how to calculate the dwell time. And then we build mathematical models for them. At last, simulation experiments have been conducted to study the convergence of off-axis parabolic hexagonal mirror with known surface error distribution, and the result shows that the accuracy has been improved.

The deformation measurement of active lap before being used to polish the mirror is one of the key factors that restrict the mirror’s quality. Usually micro displacement sensors are used to measure the deformation. The sensors are located on a square grid or a circle array, but different arrangements of sensor array bring different accuracies. Which arrangement is the best for the measuring is unknown at present. A method of calculating the best arrangement of the sensor array is put forward. Firstly, Zernike polynomial is used to represent and reconstruct the lap surface, meanwhile, the variables concerned such as the number of sensor circles and the sensor number of each circle are shown. Secondly, we choose the RMS of measurement error as the standard to judge whether an arrangement is better or worse. Thirdly, Genetic Algorithm is widely used in optimization, especially in the optimization with a lot of variables. Here using the Genetic Algorithm we can successfully achieve a better arrangement of the sensors after some generations’ evolution. The result shows that using the optimized arrangement can improve the measurement accuracy. Examples shown can prove the theory is correct.

The oblate spheroid mirror is one of the two dimension rotation surface. It is an axially symmetrical aspheric surface, but not free from spheric aberration surface. It can’t be used individually in optical systems. The oblate spheroid mirror can make up with another mirror as a free from spheric aberration optic systems. So understand the oblate spheroid mirror is essential. This paper introduced the oblate spheroid mirror and some testing method, furthermore, it also introduced how to design and choose from those method with author’s experience when we face different oblate spheroid surface.

In this paper, an optical fabrication process is introduced in detail, which is about achieving ultra-precision surface by iteration of ion beam figuring (IBF) and supersmooth polishing technology. Developed as a new technology to achieve supersmooth surface, Numerical controlled micro-jet polishing (MJP) technology is also introduced. 100mm-diameter fused silica is used as the sample. In the process, the surface is superpolished with MJP at first, then IBF is used to correct the figure, and finally MJP is applied again to finish iteration process. The path for IBF is raster scanning, and MJP processes in a spiral way. The figure and roughness of the surface are tested and analyzed with interferometer and atomic force microscope (AFM). The results indicate that ultra-precision optical surface is achieved by the iteration process with figure accuracy of 0.879nmrms, mid-spatial frequency and high-spatial frequency roughness of 0.119nmrms and 0.0726nmrms respectively.

With both ultrafast optical properties of femtosecond pulse and cylindrically symmetric polarization properties of radially polarized light, the radially polarized femtosecond pulse beam has significant applications in super-high density optical storage and ultra-intense lasers. A scheme for generating radially polarized femtosecond pulse beam by a polarization plates array is proposed, in which a phase-only liquid crystal spatial light modulator (LC-SLM) is used to load different phase retardation distribution in transverse into linearly polarized femtosecond pulse beam. Associated with a quarter wave plate, the input linearly polarized femtosecond pulse beam will be converted to radially polarized femtosecond pulse beam at the back of the polarization plates array. The experimental results indicate that the scheme can be well used to generate radially polarized light, and more effective results can be obtained with the increase of sectored polarization plates.

A new mathematical model is proposed to calculate the Material Removal (MR) on any point of the mirror’s surface during Computer Controlled Active Lap (CCAL)’s grinding and polishing. In this model, the workpiece rotation rate ω1, lap rotation rate ω₂ and the pressure P which applied on the workpiece surface by active lap are binary functions in the mirror polar coordinate system whose polar axis is from workpiece center to lap center’s initial position. The independent variables ρ and θ are the coordinates of lap center during fabrication, so the rotation rate and pressure is become to ω₁(ρ, θ), ω₂(ρ, θ) and P(ρ, θ). According to the simulation, this model can produce unsymmetrical material removal by choosing unsymmetrical ω1(ρ, θ), ω2(ρ, θ) or P(ρ, θ). This means it is possible to get the optimal ω₁, ω₂ and P functions for the demanded material removal map, and make the effects of single circle manufacture much better. This model can give active lap the unsymmetrical fabrication capability, and suitable for correcting the astigmatism or grinding off-axis aspheric surface.

The research focuses on prospect module of LED projector with high contrast and high efficiency. This is a completely new design which takes advantage of less heat interference and compactness. Simulation shows that light efficnecy of this design might be up to 46% .In addition, the liquid optics design is transformers although 720:1 for dimming plus current 2000:1. It sounds great to hear 150000:1.

Preform rod feeding module is pre-stage module in the system of Optical Fiber Drawing Tower, its stability directly affects the wire diameter precision of the fiber. For meeting the demand of scientific research to special optical fiber, we design a new kind of preform rod feeding system, using STM32 as development platform, high-performance actuating motor as executive device and high precision grating ruler as measurement device. In order to improve the stability of the system, we adopt the algorithm design of PID closed-loop control. Finally, real-time monitoring and fast response control of preform rod operation state is realized. The results show that the system runs steadily, and can meet production requirement of special optical fiber.

Laser interferometry measurement using the volatility of light, with the advantages on high resolution, high accuracy, high sensitivity and reproducibility, it has become the primary means of the optical shape measurement. Laser wavelength scanning interference moves the test aspheric mirror in the optical axis direction controlled by the electric translation stage precisely, gradually changes the relative distance between the aspheric test mirror and the interferometer. Thus the reference sphere wavefronts with different radius match automatically to different ring-zones of the aspheric mirror. Based on the laser wavelength scanning interference testing of aspheric surface, this paper calculates the center area and the annular area separately. In the annular area processing, the authors use Zernike polynomials to fit the phase diagram, then derivative along the radial direction, to extract the zero-phase points on the interferogram of each relative position, and get the angle between the normal and the aspheric axis, then rebuild the absolute position of the coordinate system of aspheric mirror. Experimental results show that the method has high accuracy and reliability.

The manipulator is a simple numerical simulation of artificial which was used in manufacturing the mirror. It can be control by the computer to adjust the lap rev and speed, to achieve quantitative removal. In the processing of large-diameter primary mirror, we used a combination according to the actual situation of the processing method. Usually two or even more manipulators were used. The method is more efficiency than the traditional CCOS processing. In this paper, the various factors which affecting the removal efficiency of manipulator were experimented. After analyzing the experiment data, the best match parameter can be found. Use this best parameter in actual processing of large-diameter mirror, the efficiency was improved a lot.

The main method of the attitude measurement is to get series of graphs for analyzing the changing attitude of the projectile by utilizing multiple shadowgraph-taking camera stations.However,the premise of accurate results is that feature points on graphs must match its spatial coordinate in a certain spatial coordinate.Addressing to this problem,combining the optical lever principle and the PSD,we propose a method of calibrating the spatial coordinate coherence of the long distance and multiple shadowgraph-taking camera stations,and analyze the measurement accuracy and repeatability of this method.According to the results,the accuracy of this calibration method is superior to 0.1mm .

This paper describes the single point diamond turning technology (SPDT) for the micro-hole machining on glow discharge polymer (GDP) capsule. The fixing and locating method of GDP capsule is firstly studied, and the special fixture for GDP capsule is designed. The special diamond tool for the machining of GDP capsule micro-hole is also designed and fabricated. The technological process of GDP capsule ultra-precision turning is analyzed, different tool feeding path and process flow is designed. Machining experiments of GDP capsules were carried out on ultra-precision machine. The experimental results show that: the capsule micro-hole will presents higher quality under the condition of exterior-to-interior feeding tool path, while it is easier to control the micro-hole’s size in machining process under the step-feeding tool path condition, which has upper research foreground. With the method of turning before mandrel degradation, the capsule is deformed easily, which cannot satisfy the accuracy request.

In order to reduce the quality of overall optical system and improve the capability of correcting aberration, amending image quality and expanding the field of view. The optical components of optical systems are trending to the lightweight aspheric with larger radius to thickness ratio. For improving the processing efficiently and restraining the mid-high frequency error, Computer Control Active Lap (CCAL) technology has become a significant method for processing. However, when the surface accuracy RMS of lightweight mirrors is lower than λ / 40 (λ = 632.8nm ), the lightweight mirror surface will appear “imprinting effect” stripes caused by Active Lap, and this phenomena has become the barriers for high-precision processing and the development of lightweight mirrors. In this paper, based on the Finite Element Analysis (FEA) software, taking an innovative way that applies reverse air to the internal structure of lightweight mirrors to resist the elastic deflection derived from the lap pressure and self-weight. And, comparing two methods: cavity inflation and immersed inflation, simulation results show that the immersion inflation method not only can eliminate the “imprinting effect, but also the surface accuracy of mirrors is much better than that only caused by selfweight during polishing process.

An optical system consisted of lens array with variable focus width has been proposed for providing uniform irradiation on targets in inertial confinement fusion. This system was composed of two lenses arrays and the aspheric lens. Based on the adaxial matrix optics and the generalized diffraction integral theory, the principle of controllable focus profile was analyzed and the optimum design of the system parameters were presented, respectively. The simulated results showed that two-dimensional uniform focusing of laser beams with controllable width in the range of several hundred microns to several millimeters can be achieved by choosing appropriate system parameters. The system converted a circular laser beam into a flat-top square focused spot, presenting the transformation of beamshape and the uniform distribution of the spatial intensity at the same time. Appropriate concentricity deviation of LA was made in the design of LA focus system, so that the diffraction patterns of different beamlets did not completely overlap and the large-scale intensity fluctuation reduced effectively, and a well-irradiated laser spot and great energy efficiency can be obtained in this scheme.

Nanoparticle colloid jet machining is an ultra smooth surface processing technique which utilizes surface chemical reaction between work surface atoms and nanoparticles in colloid to remove the work’s surface atoms. The purpose of the paper is to investigate the effects of colloid rheological characters in nanoparticle colloid jet machining. The nature of colloid determines the flow behavior of suspensions and ultimately affects the removal characteristic of nanoparticle colloid jet machining. The article focuses on how these colloid rheological characters (in particular, the pH value, the concentration and the shear viscosity of colloidal suspension) affect the machining process. A series of corresponding removal experiments have been conducted to investigate the removal peculiarities with different process parameters. The removal experimental results show that the machining rate is regularly affected by the rheological characters of colloidal suspension.

Absolute measurement technique can separate the system error from the test results, so it's widely applied in the field of high-precision surface testing. For the testing process of three-position measurement technology is simple; it's often used for the measurement of spherical components. But three-position measurement technology is sensitive to the adjustment error. Therefore the multi-location average technology was proposed, which can reduce the influence of the adjustment error. A spherical component which diameter is 80mm and F number is 1.1 was used to test by the two technologies. Test results showed that: multi-positions average measurement technology can effectively reduce the influence of the adjustment error.

The high energy laser put forward higher requirements about resistance laser damage ability of thin film on surface of optical component, this makes coating film not only consider the optical parameters of thin films, but also consider the film’s laser damage threshold to get the optical system work normally. mainly analyzing factors about effecting the SiO₂ thin film’s laser damage threshold and researching respectively the SiO₂ thin film’s optical parameters (such as extinction coefficient, thickness, refractive index and so on) and light sources parameters of testing system (such as laser times of irradiation, pulse width and so on) impact on thin film laser damage threshold. Research shows that thin film optical parameters have little influence on laser damage threshold, testing laser parameters have great influence on laser damage threshold.

Thermal/Structural/Optical (TSO) integrated analysis is used for simulating the deformation of the interferometer lens which is caused by temperature, support structure and gravity .The FEA model is established to make structure analysis and thermal analysis, and the temperature data is transformed to the analysis model to make thermal elastic analysis. Secondly, fitting out of the coefficients into the optical design software program for system evaluation of image quality with Zernike polynomial as a interface tool and evaluating the influence of temperature load on optical system performance. Reasonable thermal control methods are expected to effectively reduce the temperature gradients and improve image quality. The results shows that the wave front aberration of the system achieved is better than λ/50 (RMS) with the temperature difference should be less than ± 0.015ºC in mirror axis direction which can be fulfilled with the image quality demand under the support method. Besides, the data offered here will be useful for a reasonable design of the High-precision Interferometer lens.

How to implement high accuracy measurement of large-aperture coaxial optical system is crucial to the optical alignment and optical property evaluation. The methods of image quality measurement including interferometer-collimating testing, wave front testing by using Hartmann, image processing and analysis of out-of-focus image were introduced. Both the advantages and disadvantages of the three methods were compared, which showed that the alignment method based on interferometer-collimating testing is the one with the highest accuracy. The method of computer-aided alignment (CAA) based on interferometer-collimating was discussed in detail. By using a ZYGO interferometer, interferograms with different field of views and a series of Zernike coefficients were obtained to express the disalignment of the system, and then these incorrect parameters were calculated by CAA algorithms. An alignment experiment of coaxial three-mirror system with 4m focal length and 500mm aperture was carried out. The RMS value of the system is lower than 0.07λ after iterations, which is close to the optical diffraction limit, proving the effectiveness of CAA method in alignment guidance.

According to definition of noise factor of microchannel plate and the test principle, the authors set up a test installation, and measured the numerical values of MCPs which were made of different materials and channel pore including no / with ion barrier film in input of MCP. In order to seek the technical approach to reduce noise factor of MCP at the same time, we tested and analyzed the relation between noise factor and MCP voltage, combined relation between signal-to-noise ratio of GEN Ⅲ image intensifier and MCP voltage, open out relation between signal-to-noise ratio of GEN Ⅲ image intensifier and noise factor of MCP with ion barrier film.

A three-dimensional kinematic model of spherical mirror is developed by coordinate transformation theory. Based on the model and Preston equation, material removal rate for polishing with constant pressure can be obtained. Then the fitted parameters are determined for special process tools (pentagon tool and Uniform Removal Tool), Conclusions beneficial to glass polishing in practice are arrived. The simulate results can describe visually the material removal law of mirror under so many kinematic parameters. The work discussed above is of importance to polish flat mirror, spherical mirror and aspheric mirror with one-axis polisher.

Ion-exchange technology is low cost, and can fabricate waveguide well coupled with fiber. It is a good choice to manufacture passive device applied in the Passive Optic Net(PON). In this paper first we get surface waveguide using Ag⁺-Na⁺ ion-exchange method, then we apply 400V electric-field on the glass wafer to get waveguide buried, the whole process is at 300ºC.The width of final single-mode waveguide is 8.5μm, depth from the glass surface is 18μm. It has low coupling loss with fiber. Insertion loss of 2cm long straight waveguide can be lower than 0.6dB. Propagation loss of straight waveguide can be lower than 0.2 dB/cm. We repeat this process to manufacture 1× 8 optical power splitter. Under the wavelength 1310nm,1490nm and 1550nm, the mean value of insertion loss is 9.8dB, the maximum is 10.19dB, the minimum is 9.31dB, the maximum of PDL is 0.04dB.

This paper aims at the design and analysis of a novel micro-displacement mechanism. The micro-displacement adopts a novel flexure hinge as support, which is driven by piezoelectric actuator (PZT). The flexure hinge consists of two flexure foils, which parallel with each other and are combined permanently with connection shaft. The flexure foil structure was analyzed and simplified as simple supported beam, and the mathematical model was established. The flexure hinge was simulated with finite element analysis method. From the simulation results, the new flexure hinge has less maximum strain fluctuation rate under different force directions, compared with traditional flexure hinges. Finally, experiments were carried out on the new flexure hinge. The radial rigidities of different directions were experimentally measured, which indicate close results compared with the above analysis. According to the results, the novel micro-displacement mechanism overcomes the shortcomings of the traditional micro-displacement mechanism, and greatly improves the radial stiffness.

Strong magnetic fields can be generated when an intense laser pulse interacts with plasma. The spontaneous magnetic fields as large as several mega-Gauss have been directly measured in the blowoff plasma in front and rear of solid targets ,and attributed to a mechanism that occurs when the plasma density gradient∇n and temperature gradient ∇T are not collinear, These magnetic fields, which can become strong enough to significantly affect transport, are attributed to nonlocal effects that are missing in the standard, local theories .In this paper ,The self-generated magnetic field by a relativistic laser pulse irradiated on a thin plasma target at the perpendicular incidence is investigated using a two dimensional particle-in cell simulation.

In the optical processing, ion beam processing has been used widely for the advantages of highly-precision, less pollution and no stress and distortion. In order to analysis the preferential sputtering phenomenon, that Ar ion processing SiO₂ mirror is considered as an example, which is commonly done in ion beam processing. In order to improve the processing precision, the influence of Ar ion incident angle and incident energy on SiO₂ sputtering yield is analyzed in the case of considering the preferential sputtering phenomenon. By using the TRIM 2008 software, the sputtering situation of two elements of Si and O are simulated. The sputtering yield rate of the two elements is always a certain proportion, and the ratio is not related with the incident angle and it almost stays the same in a certain energy range. So, the SiO₂ can be thought as a whole when considering its sputtering yield, which equals to the sum of Si and O sputtering yield.

Ion beam figuring is capacity of removing materials at atoms, and the optical quality after polishing depends on not only the accuracy of processing but also the accuracy of dwell time algorithm. Deconvolution is a common method of determining the dwell time and it is generally carried out by matrix operations in the computer, so the surface figure of the optical component needs to be extended to cover throughout the matrix. First, this paper analyses the disadvantages of the extension by zero setting and Gaussian extension. And then based on the principle of matrix convolution an optimization method for the edge extension is proposed, which predicts the desired surface figure by the convolution of points in the workpiece. Finally, the simulations for ion beam figuring with Gauss extension and the optimization method proposed are made, and the results show that the optimization method taken into account the action of inner points has the better effect: the edge effect is suppressed more effectively and the algorithm achieves higher accuracy.

Compares with traditional optics,the difractive optical element(DOE) has unique property of minus dispersion.The special state can be used in the optical system to improve performance,lighten weight and reduce volume effectively.In the paper,an infrared optical system with DOE for LWIR thermal imager is proposed.The primary optical parameters of thermal imager are wavelength range 8.0- 12.0μm,effective focal length (EFL) 150 mm,f/numbe 1.0 and field of view 8.58 degrees.The system uses uncooled infrared detector with 320×240 pixels and 45μm pixel size. The f/number matches the sensitivity range of detector array. The infrared optical system is designed by CODE-V optical design software.It is consisted of two lens,the materials of the two lenses are Germanium.The DOE is fabricated on the convex of the first lens and it can be fabricated by diamond turning technology.The imaging quafity of the optical system approached to diffraction limit.The value of modulation transfer function (MTF) at Nyquist frequency(11lp/mm) is great than 0.78.

In the design and manufacture of the ultra-precision machine tools, hydrostatic slides have been applied frequently, in the state-of-the-art technology. They can provide extremely smooth and accurate motion and positioning. At design stage, the carrying capacity and the stiffness of hydrostatic slide is an important value. But, the traditional calculation method of slide stiffness used in engineering is an approximate solution, the accuracy is low. In this paper, finding an accurate calculation method of slide stiffness is present, to improve modeling accuracy. Reynolds equation is the basic equation of calculating performance of hydrostatic slide, oil film pressure distribution can be obtained by solving the Reynolds equation. But Reynolds equation is a second-order partial differential equations, it is difficult to directly solve the equation using analytic methods. Therefore, a discrete model is developed to solve the problem. A method that has been widely used is finite element analysis (FEA). Matlab PDE Toolbox provides a convenient way to solving the partial differential equations based the FEA. But it can only directly solve the partial differential equations with standard form. It is discussed how to transform the Reynolds equation into elliptic partial differential equation with standard form. Then combined with the specific boundary conditions, obtain the oil film pressure distribution through Matlab PDE toolbox, and then write program to achieve high-precision calculation of carrying capacity and stiffness of the slide.

This paper presents the principle of active fluid jet polishing for rapid fabrication. By means of the establishing corresponding mathematical model, a proposed method for producing mid or large sized high precision mirror is discussed in detail. After the final process of active fluid jet polishing, the surface figure PV is about 0.09λ(λ=633nm), the RMS is about 1/60λ and surface roughness RMS of single crystal silicon achieves 1nm. The result of experiment testify active fluid jet polishing could get the mirror of high precision and super smooth surface.

Bowl feed polishing technique still plays a very important role in the manufacturing of supper smooth optical components in industry because of low cost and high productivity. A superpolishing process based on the bowl feed technique with fine ceria hydrosol slurries is presented in this paper，which is a viable method to generate supersmooth surface meets the strict requirements of low surface and subsurface damage. A concept of super-smooth surfaces machining "Process Controlling" is introduced, which takes super-smooth surfaces machining as a chain consisted of some key nodes. Moreover, the samples were etched by Hydrofluoric acid solution to reduce the residual subsurface damage produced in previous procedure, when after fine grinding and lapping process. Meanwhile, using hydro-selection technique, the average abrasive size of polish slurry decreases remarkably, and the distribution become more uniform, which is helpful to get low surface roughness. In order to reduce the fine scratches of the top surface produced during the polishing process, the slurry is intervened exposures to ultrasonic vibration to prevent the self-reunition of the fine polishing abrasives. Finally, the middle frequency roughness of the samples, almost without scratches and pits left on the surface, is less than 0.3nm Rms, the high frequency roughness is better than 0.158 nm rms, and the subsurface damage is less than 1mircon.