Development of submicrometer resolution x-ray CT system at SPring-8

Kentaro Uesugi; Yoshio Suzuki; Naoto Yagi; Akira Tsuchiyama; Tsukasa Nakano

doi:10.1117/12.452855

7 January 2002 Development of submicrometer resolution x-ray CT system at SPring-8

Kentaro Uesugi, Yoshio Suzuki, Naoto Yagi, Akira Tsuchiyama, Tsukasa Nakano

Proceedings Volume 4503, Developments in X-Ray Tomography III; (2002) https://doi.org/10.1117/12.452855
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

A high spatial resolution x-ray CT system was developed at SPrng-8. The experiments were performed at the in-vacuum type undulator beamline BL47XU. A Si (111) double crystal monochromator is cooled with liquid nitrogen. A high precision rotation stage was used for sample rotation stage. Transmitted images were measured with an image detector. As the results of performance tests, it is considered that the spatial resolution of at least 1 micrometers was achieved with this system. The three-dimensional textures of eutectic alloy and a fossil of diatom were observed with this system.

Citation Download Citation

Kentaro Uesugi, Yoshio Suzuki, Naoto Yagi, Akira Tsuchiyama, and Tsukasa Nakano "Development of submicrometer resolution x-ray CT system at SPring-8", Proc. SPIE 4503, Developments in X-Ray Tomography III, (7 January 2002); https://doi.org/10.1117/12.452855

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